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TEM silicon nitride membrane

Single window and window array TEM silicon nitride membrane are mainly used as a support film for TEM (transmission electron microscopy) sample holder to achieve high-resolution characterization of biological or material samples under electron microscope. It can also be used as a supporter for biological cells in TEM (transmission electron microscope), SEM (scanning electron microscope), AFM (atomic force microscope), Raman spectrometer and XRD (X-ray diffraction) equipment.

Micro porous windows are manufactured by advanced MEMS process, which enables substrate-free observation of nano tubes, 2D materials and other nano-samples. Compared with micro grid carbon films, micro porous silicon nitride membrane has cleaner surface and more uniform micro porosity, which is very suitable for high-resolution characterization of biological or material samples.

Model introduction Purchase link Operating instructions Customized services

Product Features

Silicon nitride membrane is produced in the ultra-clean room using chemical vapor deposition, photoetching, reactive ion etching and other processes in the semiconductor process. Mature semiconductor technology and ultra-clean environment during processing, make the silicon nitride membrane has incomparable performance advantages over other supporting films:

High electron beam transmittance

the minimum film thickness can be up to 10nm, silicon nitride membrane material absorbs less electron beam;

Ultra-flat surface

surface roughness <0.5nm, refocusing frequency can be reduced when the window is scaned in a large area;

Temperature resistance

can withstand the highest temperature of 1000℃;

Good chemical stability

the film is resistant to acid and alkali corrosion; under the action of electron beam, it is resistant to most chemicals;

Wide range of applications

no other structure in the membrane, Cu avoidance and C avoidance observation can be achieved;

High quality assurance

piece-by-piece inspection under light microscopy, strictly control the quality;

PRODUCT PARAMETERS

Micro porous silicon nitride membrane：

Prod.#
Nitride thickness (nm)
Window size (mm)
Hole Diam. (μm)
Array Size
Pitch X=Y (μm)
Frame size (mm)
Substrate Thickness (μm)
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ME050B
30
0.5x0.5
2.8
45x45
10
3x3
200

ME050C
50
0.5x0.5
2
45x45
10
3x3
200

ME050C10
50
0.5x0.5
10
32x32
15
3x3
200

ME050E05
200
0.5x0.5
5
49x49
10
3x3
200

10 pcs in each pack

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Window array silicon nitride membrane：

Prod.#
Nitride thickness(nm)
Window size(mm)
Window #
Pitch（mm）
Frame size(mm)
Substrate Thickness（μm）
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AR010Z
10
0.1x0.1
9
0.45
3x3
200

AR010A
15
0.1x0.1
9
0.45
3x3
200

AR010B
30
0.1x0.1
9
0.45
3x3
200

AR010C
50
0.1x0.1
9
0.45
3x3
200

TA015A
15
0.1x1.5
2
0.45
3x3
200

TA015C
50
0.1x1.5
2
0.45
3x3
200

TA015A-100
15
0.1x1.5
2
0.45
3x3
100

TA015C-100
50
0.1x1.5
2
0.45
3x3
100

10 pcs in each pack

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Single window silicon nitride membrane：

Prod.#
Nitride thickness(nm)
Window size(mm)
Frame size(mm)
Substrate Thickness（μm）
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SG010Z
10
0.10x0.10
3x3
200

SG015Z
10
0.15x0.15
3x3
200

SG025Z
10
0.25x0.25
3x3
200

SG050Z
10
0.50x0.50
3x3
200

SG005A
15
0.05X0.05
3x3
200

SG025A
15
0.25x0.25
3x3
200

SG050A
15
0.5x0.5
3x3
200

SG100A
15
1x1
3x3
200

SG001AT
20
0.01x0.01
3x3
200

SG050AT
20
0.5X0.5
3x3
200

SG025B
30
0.25x0.25
3x3
200

SG050B
30
0.5x0.5
3x3
200

SG100B
30
1x1
3x3
200

SG010C
50
0.1x0.1
3x3
200

SG025C
50
0.25x0.25
3x3
200

SG050C
50
0.5x0.5
3x3
200

SG100C
50
1x1
3x3
200

SG025D
100
0.25x0.25
3x3
200

SG050D
100
0.5x0.5
3x3
200

SG010E
200
0.1x0.1
3x3
200

SG025E
200
0.25x0.25
3x3
200

SG050E
200
0.5x0.5
3x3
200

SG010B-100
30
0.1X0.1
3x3
100

10 pcs in each pack

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SILICON NITRIDE MEMBRANE STRUCTURE DIAGRAM AND PARAMETER

Frame
Parameter
Frame
Parameter

Material
N/P type silicon
Resistivity
1~10Ω*cm

Silicon nitride
Parameter
Silicon nitride
Parameter

Material
LPCVD silicon nitride
Stress
<250MPa

Dielectric constant
6-7
Dielectric strength
10（10⁶V/cm）

Resistivity
10¹⁶Ω*cm
Roughness（Ra）
0.28±5%nm

Refractive index@630nm
270GPa
Roughness（Rms）
0.40±5%nm

case show

As biology and cell carrier

As biology and cell carrier

Carbonic sample analysis

Carbonic sample analysis (Photoresist, polymers, food, oil, fuel etc.

Characterization experiments

Characterization experiments of colloids, aerogels, organic materials and nanoparticles.

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