Silicon nitride film liquid chip

The silicon nitride film liquid chip is a kind of micro and nano scale chip made of silicon nitride (SiNx) material, which is suitable for liquid environment observation. The main feature of this chip is its silicon nitride film, which has excellent properties, such as low stress (<250MPa), high stability, good biological affinity and so on.

Silicon nitride film liquid chips have important applications in many fields, such as biology, materials science, physics and chemistry. Specifically, it can be used in the following ways:

1.Electron microscope (such as TEM, SEM) sample observation, especially the observation and analysis of liquid environment samples. Due to the excellent properties of the silicon nitride film, it can provide a stable sample observation platform while resisting high temperatures and chemical corrosion.

2. In situ chemical reaction observation, crystal growth and corrosion in situ research. The silicon nitride liquid chip can observe the chemical reaction in situ without interfering with the reaction process, which is of great significance for understanding the reaction mechanism and optimizing the reaction conditions.

3.Observation of biological samples, such as live bacteria and cells. The biocompatibility of silicon nitride film makes it suitable for the observation of biological samples and provides a new means for biological research.

4.In terms of manufacturing, the production of silicon nitride liquid chips usually involves precision micro and nano processing technologies, such as lithography, etching, film preparation, etc. These technologies guarantee the high precision and high quality of the chip, making it able to meet the needs of various complex experiments.

In general, silicon nitride liquid chip is a kind of chip with wide application prospect, it plays an important role in scientific research and technological innovation.