Silicon nitride (SiₓNᵧ)thin films play a critical window role in semiconductor manufacturingand analysis, leveraging their unique physical and chemical properties—including high compactness, excellent chemical stability, favorable optical performance, and process compatibility—to enable isolation, protection, signal transmission, or analysis observation. Below is a detailed breakdown of their core roles across both domains:

Synchrotron radiation sources are a class of high-brightness electromagnetic radiation sources generated by high-energy electrons moving in curved trajectories in magnetic fields. They exhibit characteristics such as high brightness, broad spectral range, excellent collimation, and tunable polarization, making them widely applicable in materials science, life sciences, chemistry, physics, and other fields. Based on developmental stages and technical features, synchrotron radiation sources are primarily categorized into four generations, with free electron lasers (FELs)—based on stimulated emission—often regarded as an extension of synchrotron radiation.

Silicon nitride (Si₃N₄)thin films are extensively employed as observation substrates in transmission electron microscopy (TEM) and scanning electron microscopy (SEM) due to their unique physicochemical properties. Below are the corereasons and detailed analyses:

Silicon nitride membranes are ideal for synchrotron radiation and electron microscopy due to their mechanical robustness, chemical inertness, and high X-ray transmission.

Silicon nitride (Si₃N₄) membrane windows are widely used in semiconductors, electron microscopy, MEMS, optics, and new energy applications due to their excellent mechanical strength, chemical stability, and optical transparency (particularly in UV to near-infrared wavelengths).

A TEM grid (Transmission Electron Microscope grid) is a core component used to support samples in TEM imaging. It is typically a circular metal disc with a standard diameter of 3.05 mm, featuring a micron-scale array of holes (e.g., square, round, or polygonal) that hold nanoscale samples (such as thin films, nanoparticles, or biological sections). Its primary function is to provide mechanical support while allowing the electron beam to pass through both the sample and the grid's open areas, enabling high-resolution transmission electron imaging.